| MPN | MFG | Qty | PKG | D/C | SELECT |
| ATMEGA163L-4AC | ATMEL | 95 | TQFP | ||
| ATMEGA168-20MU | ATMEL | 123 | QFN | ||
| ATMEGA168V-10MU | ATMEL | 17755 | QFN32 | ||
| ATMEGA169PV-8AU | ATMEL | 6800 | QFP64 | ||
| ATMEGA169V-8AI | ATMEL | 639 | TQFP64 | ||
| ATMEGA16L | ATMEL | 1538 | QFP-44L | ||
| ATMEGA16L-8MI | ATMEL | 180 | MLF44 | ||
| ATMEGA32-16AC | ATMEL | 313 | TQFP-44 | ||
| ATMEGA324PA-CU-K | ATMEL | 927 | BGA | ||
| ATMEGA3250-16AU | ATMEL | 40 | TQFP100 | ||
| ATMEGA328PA-MU | ATMEL | 1395 | QFN | ||
| ATMEGA329-16AU | ATMEL | 332 | QFP | ||
| ATMEGA329V-8AI | AT | 53 | QFP | ||
| ATMEGA32L-8MC | AT | 822 | QFN | ||
| ATMEGA32L-8PI | AT | 178 | DIP | ||
| ATMEGA48-10PU | ATMEL | 20 | DIP | ||
| ATMEGA48V-10AV | ATMEL | 36 | QFP | ||
| ATMEGA48V-10MU | ATMEL | 34 | QFN32 | ||
| ATMEGA64-16MI | ATMEL | 2189 | QFN | ||
| ATMEGA644P-20AU | ATMEL | 1618 | TQFP44 |